pH‑EGFET Sensor Based on the Surface Modification of MacroPSi with Au-NPs

A heterostructure of (Au-NPs/MacroPSi) was synthesized by filtering a colloidal gold nanoparticles (Au-NPs) into MacroPSi layer using high voltage electrophoretic deposition (HVEPD). The aim that is to enhance the performance used as pH-EGFET sensor. For this purpose, with an average pore size 1.388 μm anodic etching Si wafer, and spherical shape Au-NPs varied in range 5 25 nm were ethanol pulsed laser ablation liquid (PLAL) technique. density on surface inside pores determined utilizing FESEM. pH sensitivity, linearity, hysteresis Au-NPs/MacroPSi sensor measured from 2 12. outcomes indicated membrane exhibited significantly enhanced sensitivity value 83.57 mV/pH linear regression 99.37%, 3 mV acid base cycles, respectively. As well rapid response ˂ s for 3-units change obtained. presence improve stability due deactivate Si–h bond enhancement conducting MacroPSi, also provide better Ohmic contact PSi. research work confirms feasibility hetero structures extended get acidity basicity detection.